AJA E-Beam Evaporator

A new e-beam evaporator was acquired in FY11; this evaporator is extensively used for EFRC supported research projects. In particular, e-beam evaporation is used to grow the conductive layers found in many of the devices fabricated by the Illinois EFRC team. These conductive layers are a critical element of any PV device, as they enable collection of photogenerated charge carriers. This evaporator has both a low base pressure, which is important for growing high quality films, and a load-lock to enable rapid sample exchange. The load lock is of particular importance given the large number of users on this system.